The Nanofabrication Lab features a state-of-the-art, 4,200 ft2 Class 100 clean room equipped with over 40 pieces of process and analytical instrumentation for complex research projects that require micro and nano scale fabrication. A central part of the Core Research Facilities, technical expertise, foundry services, and use of equipment is available for dicing, stress measurements, deposition, deep silicon etch and photo lithography. Consultative services are also available.
Location: Saab Emerging Technologies & Innovation Center, North Campus, Lowell

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