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The Nanofabrication Lab Wing of the ETIC at UMass Lowell offers clean-room facilities equipped to handle complex research projects that require micro- and nanoscale fabrication.
The Nanofabrication Lab Wing offers Class 100-, Class 1,000- and Class 10,000-level clean-room facilities. It is specifically designed for research initiatives with corporate partners and has an on-site dedicated research staff for project management.
The Nano-Micro Fabrication Laboratory offers the following core equipment. We have focused our purchases largely on new equipment to promote both cutting edge technology and machine up-time. Please note this is not our complete equipment set.
We have chosen two pieces of equipment to provide both micro and Nano image transfers capability.
The Oxford Dual Chamber Reactive Ion Etch Plasma Lab 80 Tool can be configured with many gases to etch materials such as those deposited in the PECVD tool as a sheet or around a photoresist mask. The Oxford will have one chamber dedicated to Oxygen/fluorine based etches and the other chamber dedicated Chlorine based etches.