Byungki Kim, Ph.D.
Expertise: Metrology, MEMS sensors/actuators, Optical MEMS and Micro-nano-manipulation and manufacturing
Ph.D. Mechanical Engineering, Georgia Institute of Technology
M.S. Mechanical Engineering, KAIST, Korea
B.S. Mechanical Engineering, Yonsei University, Korea
Nanoscale dimensional metrology (conventional/non-conventional), measurement on surface properties, micro/nano particle manipulation and assembly, design and development for new AFM, MEMS for sensor/actuator applications and nanomanufacturing.