Facilities
Facilities at the Photonics Center include state of the art optics and characterization laboratories, an 800 sq. ft. class 100,000 clean room with wet stations, a computer room with internet access and a fully equipped conference room.
Fabrication equipment includes photolithography equipment, a rapid thermal annealing system, thermal evaporator, e-beam evaporator and a 'home made' Ion beam etching machine, solid source molecular beam epitaxy system. A new nanomechanical analyzer purchased with a 2004 DURIP equipment was installed in July 2004 plus a laboratory that houses the Center's Riber 3200 MBE machine and the Corning Lasertron donated Veeco MBE system.
Phone: 978-934-3974 Fax: 978-934-4994 contact Us