Fabrication

Our Sloan Multihearth 270º Electron Beam Gun is a heavy-duty source for production deposition of thin films. It offers large hearth capacity, high deposition rates, four 7cc long filament life, and industrial-level reliability in a package small enough to be compatible with virtually any vacuum system. In 270º bent-beam guns, the electrons are thermionically emitted from a hot filament, accelerated by a grounded electrode, and focused into the hearth by a magnetic lens. Therefore it heats the evaporant material and causes evaposition. In our system, most of the metals can be loaded into the hearth for evaporation and the evaporation rate can be monitored by a XTM/2 Deposition Monitor.


Thermal Evaporator

Edwards 306A Vacuum Coating System is a thermal evaporator system with wide ranges of applications in metal and dielectric evaporation. It is used for thin film deposition of In, Au, SiN etc. The film thickness is monitored with high accuracy by the STM-100 Thickness/Rate monitor.

Sputtering Bromine- Ion Beam Assisted Etcher

Other facilities include, a rapid thermal annealing system (RTA), wafer bonder, wafer scriber, wire bonder etc.


Lithography

top