The purpose of this course is to give a broad introduction to Micro-electro-mechanical Systems (MEMS) technology, and will provide graduate students in mechanical, electrical, manufacturing and related engineering disciplines with necessary fundamental knowledge and experience in the design, manufacture, and packaging of microsystems. The topics include basic sensing and actuating principles, modeling of electromechanical components, material properties, fabrication technologies, process integration, system design, and packaging of MEMS and microsystems. The course will also cover current literature, MEMS markets and aplications. The course will be a combination of lectures, case studies and homework assignments. The students are expected to possess prerequisite knowledge in college mathematics, physics, and chemistry, as well as in engineering subjects such as fundamental materials science, electronics, thermal-fluid, and machine design.
