Soft nanolithography for manufacturing chips for biosensing and chemical sensing
Mengyan Shen, Physics
We have recently found a technique for fabricating nanostructures on a solid surface with intense femtosecond laser pulse irradiation. The technique is highly efficient because it is several orders faster than electron beam writing and ion beam etching, and is applicable to different materials. This technique has potential applications in optoelectronics, such as high efficient photo detectors and solar cells; as well as in biology and medicine researches, such as micro/nano tunnels for low friction fluidity, and nanostructured metal surface for bone implant.